We have two e-beam evaporation systems, a Plassys MEB550S and a Plassys MEB550S2. The Plassys MEB550S2 is a ultra high vacuum(UHV) system, the materials available for deposition are Aluminum and Niobium. The Plassys MEB550S is a High Vacuum(HV) system, the materials available for deposition are gold, chromium, aluminum, platinum and palladium.
Tool Owner: Lubuna Shafeek