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Nanofabrication Facility

Our facility has a cleanroom space of ~400 sqm of new ISO 7 (class 10000), ISO 6 (class 1000) and with specific areas ISO 5 (class 100) – equipped with all the state of the art nanofabrication facilities.

We provide IST Austria researchers with tools to fabricate and characterize semiconductor, optomechanical and microfluidic devices.

Check here our cleanroom facilities through a virtual tour experience!