Photo Resists
Resist | 1000 rpm (um) | 2000 rpm (um) | 4000 rpm (um) | 6000 rpm (um) |
SPR 220.7 | 10.5 | 9 | 6.5 | 5.5 |
S1818 | 4.12 | 2.88 | 2.03 | 1.67 |
S1805 | 0.91 | 0.64 | 0.46 | 0.4 |
E-beam Resists
Resists | 1000 rpm (um) | 2000 rpm (um) | 4000 rpm (um) | 6000 rpm (um) |
PMMA 950k 4% | 0.63 | 0.4 | 0.27 | 0.22 |
PMMA 950k 3% | 0.31 | 0.23 | 0.16 | 0.12 |
PMMA 950k 2% | 0.12 | 0.10 | 0.07 | 0.06 |
PMMA 600k 7% | 1.66 | 1.07 | 0.74 | 0.6 |
PMMA 600k 6% | 0.99 | 0.74 | 0.52 | 0.42 |
PMMA 600k 4% | 0.46 | 0.31 | 0.22 | 0.18 |
MMA (8.5) MAA EL 13 | 1.3 | 0.8 | 0.6 | – |
MMA (8.5) MAA EL 9 | – | 0.44 | 0.32 | 0.26 |
CSAR 13% | 0.4 | 0.3 | ||
CSAR 4% | 0.08 | |||
PMMA 50k 4% | 0.16 | 0.12 | 0.08 | 0.07 |