We have an Oxford Instruments FlexAL II with two precursors available:
1) Tetrakis dimethylamino hafnium for deposition of plasma and thermal Hafnia.
2) Trimethylaluminium for deposition of plasma and thermal Alumina.
Tool Owner: R.Previdi
We have an Oxford Instruments FlexAL II with two precursors available:
1) Tetrakis dimethylamino hafnium for deposition of plasma and thermal Hafnia.
2) Trimethylaluminium for deposition of plasma and thermal Alumina.
Tool Owner: R.Previdi