Guide for new users

How to gain access to the Nanofabrication Facility?

Take the mandatory NFF general introduction.

How to gain access to the tools?

1. Schedule an introduction to the tool, through PPMS, with the responsible staff member (see table below).
2. You can gain experience with the tool by joining your labmates in their sample fab or simply ask for help to the NFF staff.
3. Take the practical test, where you will demonstrate your ability to safely and independently operate the tool.
4. Turn-in the corresponding authorization form, signed by your supervisor.

Tool Owner Back up
EBPG Salvo Juan
SEM Juan Evgeniia
PFIB Evgeniia Juan
Mask Aligner Lubuna Evgeniia
Profilometer Juan Bruno
Optical Microscopes Bruno Lubuna
Plassys HV Matko Lubuna
Plassys UHV Bruno Lubuna
ICP-Cl Rodolfo Juan
ICP-F Bruno Rodolfo
ALD Matko Lubuna
Ellipsometer Rodolfo Lubuna
RTA Juan Bruno
Plasma Asher Evgeniia Lubuna
Vapor HF Lubuna Matko
Dicing Saw Rodolfo Bruno
Wire Bonder Juan Rodolfo
DC Probe Station Juan Lubuna
Wet Bench (Acids) Evgeniia Lubuna
Wet Bench (Solvents) Rodolfo Bruno
Wet Bench (HF) Lubuna Bruno
Polishing System Matko Bruno
AFM Juan Lubuna
PPMS Lubuna Juan
HV Sputtering Matko Lubuna
UHV Sputtering Bruno Matko
3D Printer Rodolfo Lubuna
Raman Microscope Rodolfo Evgeniia

Updated 23.1.2024 by JuAg