Guide for new users

How to gain access to the Nanofabrication Facility?

Take the mandatory NFF general introduction.

How to gain access to the tools?

1. Schedule an introduction to the tool, through ppms, with the responsible staff member (see table below).
2. You can gain experience with the tool by joining your labmates in their sample fab or simply ask for help to the NFF staff.
3. Take the practical test, where you will demonstrate your ability to safely operate the tool.
4. Turn in the corresponding authorization form, signed by your supervisor.


Tool Owner Back up
EBPG Salvo Juan
SEM Juan  
PFIB Juan  
Mask Aligner Jack / Nasima  
Profilometer Nasima Lubuna
Optical Microscopes Nasima Lubuna
Plassys HV Nasima Lubuna
Plassys UHV Lubuna Nasima
ICP-Cl Juan Rodolfo
ICP-F Rodolfo Juan
ALD Rodolfo Lubuna
Ellipsometer Nasima Lubuna
RTA Juan Nasima
Plasma Asher Juan Nasima
Vapor HF Lubuna Juan
Dicing Saw Juan Rodolfo
Wire Bonder Juan Lubuna
DC Probe Station Juan Lubuna
Wet Bench (Acids) Lubuna Juan
Wet Bench (Solvents) Rodolfo Nasima
Wet Bench (HF) Lubuna Nasima
Polishing System Rodolfo  
AFM Juan Lubuna

Updated 9.3.2022 by JuAg