Guide for new users

How to gain access to the Nanofabrication Facility?

Take the mandatory NFF general introduction.

How to gain access to the tools?

1. Schedule an introduction to the tool, through ppms, with the responsible staff member (see table below).
2. You can gain experience with the tool by joining your labmates in their sample fab or simply ask for help to the NFF staff.
3. Take the practical test, where you will demonstrate your ability to safely operate the tool.
4. Turn in the corresponding authorization form, signed by your supervisor.


Tool Owner Back up
EBPG Salvo Juan
SEM Juan Stefan
PFIB Stefan Juan
Mask Aligner Jack / Stefan Nasima
Profilometer Nasima Lubuna
Optical Microscopes Nasima Lubuna
Plassys HV Nasima Lubuna
Plassys UHV Lubuna Nasima
ICP-Cl Juan Salvo
ICP-F Juan Salvo
ALD Juan Lubuna
Ellipsometer Nasima Lubuna
RTA Juan Nasima
Plasma Asher Stefan Juan
Vapor HF Lubuna Juan
Dicing Saw Juan Stefan
Wire Bonder Juan Lubuna
DC Probe Station Juan Lubuna
Wet Bench (Acids) Lubuna Juan
Wet Bench (Solvents) Nasima Lubuna
Wet Bench (HF) Lubuna Nasima
Polishing System Salvo Stefan
AFM Juan Lubuna

Updated 28.4.2021 by JuAg