Guide for new users

How to gain access to the Nanofabrication Facility?

Take the mandatory NFF general introduction.

How to gain access to the tools?

1. Schedule an introduction to the tool, through ppms, with the responsible staff member (see table below).
2. You can gain experience with the tool by joining your labmates in their sample fab or simply ask for help to the NFF staff.
3. Take the practical test, where you will demonstrate your ability to safely operate the tool.
4. Turn in the corresponding authorization form, signed by your supervisor.


Tool Owner Back up
EBPG Salvo Juan
SEM Juan Masoud
Mask Aligner Jack / Lubuna Ying
Profilometer Lubuna Juan
Optical Microscopes Ying Lubuna
Plassys HV Ying Lubuna
Plassys UHV Lubuna Ying
ICP-Cl Juan Masoud
ICP-F Juan Masoud
ALD Masoud Juan
Ellipsometer Juan Masoud
RTA Juan Lubuna
Plasma Asher Lubuna Juan
Vapor HF Lubuna Juan
Dicing Saw Juan Masoud
Wire Bonder Juan Ying
DC Probe Station Juan Lubuna
Wet Bench (Acids) Ying Juan
Wet Bench (Solvents) Ying Lubuna
Wet Bench (HF) Lubuna Masoud
Polishing System Masoud Salvo
AFM Juan Lubuna