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Nanofabrication Facility, IST Austria
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Home
Resources
Guide for new users
Phone Book
Available Resists
Manuals, Instructions and Forms
Equipment
Atomic Force Microscope
Atomic Layer Deposition
DC Probe Station
Dicing Saw
Die Bonder
E-beam lithography
Ellipsometer
ICP Etching
Lapping and Polishing Equipment
Mask Aligner
Microscopes
Plasma Asher
Plasma Xe Focus Ion Beam
Profilometer
Rapid Thermal Annealer
SEM
Thin film deposition
Vapor HF Etching
Wire Bonder
People
PPMS
External Users
Contact
Get in touch with us
Cleanroom Virtual Tour