Available Resists

Photo Resists

Resist	1000 rpm (um)	2000 rpm (um)	4000 rpm (um)	6000 rpm (um)
SPR 220.7	10.5	9	6.5	5.5
S1818	4.12	2.88	2.03	1.67
S1805	0.91	0.64	0.46	0.4

E-beam Resists

Resists	1000 rpm (um)	2000 rpm (um)	4000 rpm (um)	6000 rpm (um)
PMMA 950k 4%	0.63	0.4	0.27	0.22
PMMA 950k 3%	0.31	0.23	0.16	0.12
PMMA 950k 2%	0.12	0.10	0.07	0.06
PMMA 600k 7%	1.66	1.07	0.74	0.6
PMMA 600k 6%	0.99	0.74	0.52	0.42
PMMA 600k 4%	0.46	0.31	0.22	0.18
MMA (8.5) MAA EL 13	1.3	0.8	0.6	–
MMA (8.5) MAA EL 9	–	0.44	0.32	0.26
CSAR 13%			0.4	0.3
CSAR 4%			0.08
PMMA 50k 4%	0.16	0.12	0.08	0.07