We have an MLA150 system from Heidelberg Instruments.
Specs
Minimum feature size [μm] 0.6
Minimum lines & spaces [μm] 0.8
Global 2nd layer alignment [nm] 500
Local 2nd layer alignment [nm] 250
Backside alignment [nm] 1000
Tool Owner: Matko Kandzija, J. Aguilera (Back Up)