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Nanofabrication Facility

Our facility has a cleanroom space of ~400 sqm of new ISO 7 (class 10000), ISO 6 (class 1000) and with specific areas ISO 5 (class 100) – equipped with all the state of the art nanofabrication facilities.

We provide ISTA researchers with tools to fabricate and characterize semiconductor, optomechanical and microfluidic devices.

The NFF is open 7 days a week – 24 hours a day and it is only accessible with an authorized IST Austria-NFF e-badge. The business hours are fixed Monday -Thursday from 8:30 a.m. to 5:00 p.m. and Friday from 8:30 a.m. to 3:00 p.m.

Check here our cleanroom facilities through a virtual tour experience!